Prof. Dr.-Ing. Günther Benstetter
- Microelectronics and Microsystems Technology
- Electronic Components
- Material Sciences and Applied Solid-State Physics
- Quality Assurance and Reliability Analytics
Academic dean
Dean of Studies
consulting time
by arrangement
projects
several projects in the fields of surface analysis, thermal and electrical characterisation of new materials, >20 completed projects
labs
Electronic Components, Scanning Probe Microscopy (SPM), Scanning Electron Microscopy (SEM) and Semiconductor Analytics
core competencies
Materials- and Surface Analysis
* Scanning Electron Microscopy & Related Methods
X-ray analytics (EDX, WDX), structure and microstructure analytics (EBSD), micro X-ray fluorescence (μ-XRF) scanning transmission electron microscopy (STEM), correlative microscopy
* Scanning Probe Microscopy & Laser-Scanning Microscopy
combined mechanical, magnetic, electric, thermal and chemical microcharacterisation
* Thermal Characterisation
Quality Assurance and Reliability Analytics
error and failure analytics, semiconductor wafer level tests and lifetime calculations
Vita
Academic History
Present rank: Professor, Deggendorf Institute of Technology, 1998 Ph.D.: Technical University of Munich, 1994 University degree: Electrical Engineering, Technical University of Munich, 1989
Employment History
1989-1994: Research assistant, Technical University of Munich 1994-1998: Siemens, IBM/Siemens/Toshiba DRAM – Project in Burlington, Vermont, USA 1998-present: Professor, Deggendorf Institute of Technology, Faculty of Electrical Engineering and Media Technology, Head of Institute for Quality and Materials Analysis (IQMA)
Other
Associate Editor of Microelectronic Engineering (Elsevier)